Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524


J. Korean Phy. Soc. 2009; 54(6): 2396-2399

Published online June 15, 2009

Copyright © The Korean Physical Society.

Optical Transmittance Study by Using a Modified Envelope Analysis for Al-ZnO Thin Films

Junje Seong, DeukYoung Kim, Sejoon Lee


In this study, we investigated the optical transmittance of Al-dopedZnO (AZO) thin films. As the first step, we deposited AZO films onglass substrates and measured the optical transmittance in thewavelength range from 200 nm to 800 nm in order to determine theoptical constants of film (the absorption coefficient, theextinction coefficient and the refractive index). Using theseparameters, we calculated and simulated the average transmittance inthe visible wavelength range as a function of the films thickness bymeans of modified envelope analysis (MEA) method. As a simulationresult, the first maximum transmittance appeared for a thickness of151 nm and oscillated with a thickness period of 151 nm. Then, wecompared the experimental transmittance data with do to obtained byusing the MEA method for species of AZO films deposited withvariation of film thicknesses. We confirmed that the experimentalaverage optical transmittance agreed well with the theoreticaltransmittance simulated by using the MEA method.

Keywords: Al-doped ZnO, Optical parameter, Modified envelope analysis, Transparent conductive oxide