Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524


J. Korean Phy. Soc. 2008; 53(9(5)): 2544-2548

Published online November 15, 2008

Copyright © The Korean Physical Society.

Optical and Structural Properties of ZrO$_2$ Thin FilmsFabricated by Using Glancing Angle Deposition

K.M. Sobahan, YongJun Park, ChangKwon Hwangbo


In this paper, the optical and the structural properties of ZrO$_2$thin films deposited by using electron beam evaporation with aglancing angle deposition (GLAD) technique are presented. The filmsprepared by using the glancing angle deposition technique werehighly oriented structures composed of slanted columns and voids dueto the shadow effect and limited adatom diffusion. The relationshipsamong the refractive index, the porosity and the deposition anglewere studied. The results show that the refractive index decreasesand the porosity increases with increasing deposition angle. Thein-plane birefringence of the ZrO$_2$ thin films was measured and itreached a maximum value of 0.038 at a deposition angle of70$^circ$. The microstructure and the morphology were alsoinvestigated by using a scanning electron microscope (SEM). We foundthat the optical anisotropy and the microstructure of the ZrO$_2$thin films could be controlled by the GLAD technique.

Keywords: Glancing angle deposition, ZrO$_2$ films, Birefringence