Dependence of the Material Properties and PDP Discharging Characteristics on the MgO Evaporation Rate

Abstract
The effects of the evaporation rate of MgO films using an electron beam on the MgO properties and the discharge characteristics of a plasma display panel (PDP) were investigated. The evaporation rate was changed from 3 AA/sec to 15 AA/sec at a substrate temperature of 300 $^circ$C. The MgO properties, such as the crystal orientation, the surface roughness, the contact angle, and the film structure, were inspected using XRD (X-ray diffractometry), AFM(atomic force microscopy), and drop-shape analysis. We also studied the relation between the properties of MgO and the discharging characteristics of the PDP. The minimum firing voltage and the maximum luminous efficiency were obtained at an evaporation rate of 5 AA/sec. In the MgO film deposited at 5 AA/sec, the (200) orientation was most intensive, and the surface roughness was minimum

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