Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524
Qrcode

Article

J. Korean Phy. Soc. 2003; 42(9(2)): 606

Published online February 1, 2003     https://doi.org/

Copyright © The Korean Physical Society.

Application of Nano-cluster Ion Beam to Surface Smoothening, Etching, and Ultra-shallow Junction Formation

J. H. Song, W. K. Choi