Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524


J. Korean Phy. Soc. 1998; 33(9(2)): 142

Published online October 1, 1998

Copyright © The Korean Physical Society.

Biaxial Stress Analysis in Laminated Polymer Films on Silicon Substrates for MCM-D Application

J.S. Kim, K.W. Paik, H.S. Seo, S.H. Oh