Ex) Article Title, Author, Keywords
Ex) Article Title, Author, Keywords
Published online January 28, 2022 https://doi.org/10.1007/s40042-021-00380-z
Copyright © The Korean Physical Society.
Hyemin Jang, Moonkyong Na, Wook Bahng, Jung Woo Lee
In this study, the inclination of threading dislocations in an on-axis single-crystal free-standing diamond grown by microwave plasma-enhanced chemical vapor deposition (MPCVD) was analyzed using synchrotron white beam X-ray topography (SWBXRT). The majority of dislocations in CVD-grown diamond were known as [001] threading dislocation; however, SWBXRT indicated that the dislocations were inclined from [001] direction. The exact [001] dislocation accounted for 20 % of investigated dislocations, and the remaining dislocations inclined randomly from the [001] direction with 7–12°. The analyzed sample has no dependence on a particular direction due to localized step flow caused by on-axis growth.
Copyright © 2016 The Korean Physical Society.
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