Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524
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Article

J. Korean Phys. Soc. 2020; 76(12): 1071-1075

Published online June 30, 2020     https://doi.org/10.3938/jkps.76.1071

Copyright © The Korean Physical Society.

Effects of Oxygen Adsorption on Morphological Evolution of Epitaxial Ag Island Films Grown on Si

Jongpil Ye, Dongchul Lee, Yongsik Jin

Department of Materials Science and Engineering, Inha University, Incheon 22212, Korea

Correspondence to:Jongpil Ye

Abstract

In this paper, we investigate the effect of annealing gas compositions on the morphological evolution of heteroepitaxial silver island films grown on silicon substrates. We show that the presence of oxygen during thermal annealing leads to the formation of more isotropic silver islands with enhanced rates of dewetting and coarsening. This is explained by the results of morphology analysis and density functional theory calculation showing that a larger extent of oxygen adsorption under oxygen annealing ambient decreases the surface energy anisotropy of silver and the surface diffusion barrier of silver adatoms and clusters.

Keywords: Ag islands, Oxygen adsorption, Dewetting, Coarsening, Surface energy anisotropy

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