Journal of the Korean Physical Society

pISSN 0374-4884 eISSN 1976-8524
Qrcode

Article

J. Korean Phy. Soc. 2009; 55(1): 32-37

Published online July 15, 2009     https://doi.org/10.3938/jkps.55.32

Copyright © The Korean Physical Society.

Atomic Layer Deposition of Ruthenium and Ruthenium-oxide ThinFilms by Using a Ru(EtCp)$_{2}$ Precursor and Oxygen Gas

Woo-Hee Kim, Sang-Joon Park, DoYoung Kim, Hyungjun Kim

Abstract

vspace{-0.2cm}In this study, the growth characteristics and the film properties ofRu and RuO$_{2}$ thin films were systematically investigated,focusing on the effects of the oxygen exposure and the growthtemperature. Pure Ru thin films with low resistivity were depositedfrom bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)$_{2}$] as a Ruprecursor and oxygen (O$_{2})$ as a reactant by using thermal atomiclayer deposition (ALD). Phase change from Ru to RuO$_{2}$ wasobserved by controlling the growth parameters, including the O$_{2}$flow rate and the growth temperature. In order to investigate thedependence of the phase change on the deposition parameters, weevaluated the crystalline structure and the chemical composition byusing X-ray diffraction (XRD) and X-ray photoelectron spectroscopy(XPS).

Keywords: Ru, RuO$_{2}$, Atomic layer deposition, Growth characteristics, Films properties, Effects of oxygen exposure, Effects of growth temperature, Phase control