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Determination of the CD Performance and Carbon Contamination of an EUV Mask by Using a Coherent Scattering Microscopy/In-situ Contamination System
Jinho Ahn, Jonggul Doh, Changyoung Jeong, Sangsul Lee, Jaeuk Lee, Hansun Cha, Donggun Lee, Seongsue Kim, Hanku Cho, Seungyu Rah
J. Korean Phy. Soc. 2010; 57: 1486-1489  
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? Optical Properties of TiO2 Zigzag Films Prepared by Oblique Angle Deposition
Chang Kwon Hwangbo, Yong Jun Park, KMA. Sobahan, Jinho Ahn
J. Korean Phy. Soc. 2010; 56: 1378-1381  
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Aerial Image Characteristics of a Modified Absorber Model for Extreme Ultraviolet Lithography (EUVL)
In-Yong Kang, Jinho Ahn, Yong-Chae Chung and Hye-Keun Oh
J. Korean Phy. Soc. 2008; 52: 1759-1762  
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Electrical and Reliability Characteristics of HfO2 MOS Capacitor with Mo Metal Gate Electrode
In-Sung Park, Taeho Lee, Hankyong Ko and Jinho Ahn
J. Korean Phy. Soc. 2006; 49: 760-  
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Study of a Thin Al2O3/TaN Absorber Stack on Ru-Capped Multilayers
Tae Geun Kim, Byung Hun Kim, In-Yong Kang, Yong-Chae Chung, Jinho Ahn, Seung Yoon Lee, In-Sung Park, Chung Yong Kim and Nae-Eung Lee
J. Korean Phy. Soc. 2006; 49: 721-  
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Fabrication of Two-Dimensional Periodic Structures in an Amorphous Silicon Film by Four-Beam Interference Lithography
Geon Joon Lee, YoungPak Lee, Kyung-Rae Kim, ?Moon Ik Jang, Chong Seung Yoon, Jinho Ahn, Yong-Duck Son and Jin Jang
J. Korean Phy. Soc. 2006; 49: 716-  
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Resistive Switching Characteristics of HfO2 Grown by Atomic Layer Deposition
Kyong-Rae Kim, In-Sung Park, Jin Pyo Hong, Sang Seol Lee, Bang Lim Choi and Jinho Ahn
J. Korean Phy. Soc. 2006; 49: 548-  
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Metal Precursor Effects on Deposition and Interfacial Characteristics of HfO2 Dielectrics Grown by Atomic Layer Deposition
In-Sung Park, Taeho Lee, Duck-Kyun Choi and Jinho Ahn
J. Korean Phy. Soc. 2006; 49: 544-  
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Defect Characterization of Ru/Mo/Si EUV Reflector by Optical Modeling
In-Yong Kang, Yong-Chae Chung, Hye-Keun Oh and Jinho Ahn
J. Korean Phy. Soc. 2005; 47: 373-  
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Thermal and Electrical Properties of TaN Electrode on HfO Gate Dielectric
Taeho Lee, Han-Kyoung Ko, Youngsoon Kim, Jinho Ahn, Young-Bae Kim, Kwang Su Kim, Duck-Kyun Choi
J. Korean Phy. Soc. 2004; 45: 1308-  
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