Decomposition of Sulfur Hexafluoride by Using a Nonthermal Plasma-assisted Catalytic Process
D. H. Kim, Yo. S. Mok
The decomposition of SF6 was investigated in a nonthermal plasma-assisted catalytic reactor over a temperature range up to 500oC with a simulated exhaust gas consisting of SF6, oxygen and nitrogen. A dielectric barrier discharge (DBD) reactor filled with alumina beads as a catalyst was employed to create nonthermal plasma. The effect of reactor temperature, oxygen content and electrical power on the decomposition of SF6, and the results were discussed. The plasma-assisted catalytic reactor showed different behaviors according to the operating temperature ranges. In the lower temperature region below 400oC, the temperature dependence of the SF6 decomposition was small, while on the other hand there was a steep increase in the decomposition with increasing the reactor temperature over 400oC, reaching 96% decomposition efficiency at 495oC. With other conditions kept constant, higher SF6 decomposition efficiency was observed at higher electrical power or at lower oxygen content. The identified byproducts from the decomposition of SF6 were sulfur dioxide (SO2) and sulfuryl fluoride (SO2F2). The energy yield was in the range of 0.53~0.92 mg kJ-1 for the low temperature region, and in the range of 1.16~1.92 mg kJ-1 for the high temperature region.
J. Korean Phy. Soc. 2011; 59: 3437-3441
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