Performance Test of a Laboratory-Based Ambient Pressure X-ray Photoelectron Spectroscopy System at the Gwangju Institute of Science and Technology

1Department of Physics and Photon Science, Gwangju Institute of Science and Technology, Gwangju 61005, Korea
2Scienta Omicron AB, P.O. Box 15120 SE-750 15 Uppsala, Sweden
Correspondence to: Bongjin Simon Mun
Abstract
The performance test of newly installed laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at Gwangju Institute of Science and Technology was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al K$\alpha$ X-ray source, is designed to operate a gas pressure of up to 25 Torr. Two modes of XPS operations were tested, a transmission mode and an 1D chemical imaging mode. In the transmission mode, $i.e.$, a typical standard lens operation mode, a good intensity-to-signal ratio of core-level spectra was obtained under Ar gas pressure up to 1 Torr. For the operation of imaging mode, a spatial resolution of ~10 $\mu$m was achieved at Ar gas pressure of 500 mTorr.
PACS numbers: 82.80.Pv, 82.80.−d
Keywords: Ambient Pressure XPS (AP-XPS), Transmission mode, 1D chemical imaging mode

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