Performance Test of a Laboratory-Based Ambient Pressure X-ray Photoelectron Spectroscopy System at the Gwangju Institute of Science and Technology
J. Korean Phys. Soc. 2019; 75: 541~546
Published online October 15, 2019 © 2019 The Korean Physical Society.


1Department of Physics and Photon Science, Gwangju Institute of Science and Technology, Gwangju 61005, Korea 
2Scienta Omicron AB, P.O. Box 15120 SE-750 15 Uppsala, Sweden
Correspondence to: Bongjin Simon Mun
Abstract
The performance test of newly installed laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at Gwangju Institute of Science and Technology was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al K$\alpha$ X-ray source, is designed to operate a gas pressure of up to 25 Torr. Two modes of XPS operations were tested, a transmission mode and an 1D chemical imaging mode. In the transmission mode, $i.e.$, a typical standard lens operation mode, a good intensity-to-signal ratio of core-level spectra was obtained under Ar gas pressure up to 1 Torr. For the operation of imaging mode, a spatial resolution of ~10 $\mu$m was achieved at Ar gas pressure of 500 mTorr.
PACS numbers: 82.80.Pv, 82.80.−d
Keywords: Ambient Pressure XPS (AP-XPS), Transmission mode, 1D chemical imaging mode


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