Investigation of Thermomechanical Motion in a Nanomechanical Resonator Based on Optical Intensity Mapping
J. Korean Phy. Soc. 2017; 71: 684~691
Published online October 31, 2017 © 2017 The Korean Physical Society.

1Graduate School of Nanoscience and Technology, Korea Advanced Institute of Science and Technology, Daejeon 34141, Korea

2Korea Research Institute of Standards and Science, Daejeon 34113, Korea

3Department of Physics and Astronomy, Seoul National University, Seoul 08826, Korea

4Department of Physics, Chungnam National University, Daejeon 34134, Korea

Correspondence to: Sungwan Cho
We demonstrate optical investigation of multiple flexural modes of a nanomechanical resonator in thermal motion based on amplitude-modulated laser light. We measure higher-order resonant mode up to ~17 MHz using this technique. Scanning focused laser light reproduce mode shape of each flexural mode and theoretical estimation on measurement sensitivity shows displacement sensitivity of ~10-15 m/Hz1/2. For a nanomechanical device which cannot compatible with interferometric system, this technique can exhibit sufficient sensitivity to explore small motional state.
PACS numbers: 62.30.+d, 62.40.+i, 42.30.Kq, 42.15.Eq, 07.10.Cm, 62.25.-g
Keywords: Thermal motion, Laser reflection measurement, Mode mapping, Finite element analysis

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