Search Result:
Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
Kwang-Man Lee, Chang Young Kim, Chi Kyu Choi, R. Navamathavan
J. Korean Phy. Soc. 2011; 59: 3074-3079  
Full Text(PDF)
Effect of Ultraviolet Irradiation on the Defect States and the Charge Transport Properties of Low-k SiOC(-H) Dielectric Films Deposited by Using UV-assisted PECVD
A. S. Zakirov, T. W. Kang, R. Navamathavan, C. Y. Kim, C. K. Choi
J. Korean Phy. Soc. 2011; 58: 1393-1397  
Full Text(PDF)
  Electrical conduction in low dielectric constant SiOC(-H) films with nano-pore structure using dimethyldimethoxysilane /O2 precursors deposited by plasma-enhanced chemical vapor deposition
Chi Kyu Choi, Jong Kwan Woo, R. Navamathavan, Kwang Man Lee, Chang Young Kim, Heang Seuk Lee
J. Korean Phy. Soc. 2010; 56: 1478-1483  
Full Text(PDF)
Preparation and Properties of Low Dielectric Constant SiOC(-H) Thin Films Deposited by Using PECVD
R. Navamathavan, Cheul Ro Lee, R. Nirmala, Chang Young Kim, Chi Kyu Choi
J. Korean Phy. Soc. 2010; 56: 818-822  
Full Text(PDF)
A study on the Properties of Cu/SiOC(-H)/p-Si(100) and Cu/TaN/SiOC(-H)/p-Si(100) Interface
Chi Kyu Choi, Chang Young Kim, R. Navamathavan, Heang Seuk Lee, Younghun Yu, Jong-Kwan Woo
J. Korean Phy. Soc. 2009; 55: 1960-1964  
Full Text(PDF)
Effects of the formation temperature of Au + Ga solid solution droplets on the growth behaviors of GaN nanowires on Si(111) by using MOCVD
Cheul-Ro Lee, Eun-Su Jang, Yong-Ho Ra, Young-Min Lee, Heon Song, Dong-Wook Kim, R. Navamathavan, Jin-Soo Kim, In-Hwan Lee
J. Korean Phy. Soc. 2009; 55: 1496-1500  
Full Text(PDF)
Morphological and Compositional Changes at the SiOC(-H)/{itp}-Si(100) Interface Region Prepared by Using PECVD
HeangSeuk Lee, ChangYoung Kim, R. Navamathavan, Jong-Kwan Woo, Younghun Yu, ChiKyu Choi, Kwang-Man Lee
J. Korean Phy. Soc. 2009; 55: 1087-1092  
Full Text(PDF)
Investigation of Electrical Conduction in Low-dielectric-constantSiOC(-H) Thin Films Deposited by Using PECVD
R. Navamathavan, ChangYoung Kim, HeangSeuk Lee, Jong-Kwan Woo, Younghun Yu, ChiKyu Choi, HeonJu Lee
J. Korean Phy. Soc. 2009; 55: 227-231  
Full Text(PDF)
Bonding Configuration and Electrical Properties of Carbon-Incorporated Low-Dielectric-Constant SiOC(-H) Films withNano-Pore Structures Deposited by Using PECVD
ChangYoung Kim, AnSoo Jung, R. Navamathavan, ChiKyu Choi, Jong-Kwan Woo
J. Korean Phy. Soc. 2008; 53: 2621-2626  
Full Text(PDF)
Nano-Mechanical Analyses of Low-Dielectric-Constant SiOC(-H) Thin Films Deposited by Using Plasma-Enhanced Chemical-Vapor Deposition
AnSoo Jung, ChangYoung Kim, R. Navamathavan, Jong-Kwan Woo, Kwang-Man Lee, ChiKyu Choi
J. Korean Phy. Soc. 2008; 53: 2512-2517  
Full Text(PDF)
◀◀ [1] [2] ▶▶
Go to page for Current Issue
Go to page for Current Issue

  • e-Submission
  • For review & Editor

Indexed/Covered by

  • Scopus