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Characteristics of SiO2 Etching with a C4F8/Ar/CHF3/O2 Gas Mixture in 60-MHz/2-MHz Dual-frequency Capacitive Coupled Plasmas
M. H. Jeon, S-K. Kang, J. Y. Park, G. Y. Yeom
J. Korean Phy. Soc. 2011; 59: 3024-3030  
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Characteristics of SiOx Thin Films Deposited by Using Direct-Type Pin-to-Plate Dielectric Barrier Discharge with PDMS/He/O2 Gases at Low Temperature
J. H. Lee, Y. S. Kim, S. J. Kyung, J. T. Lim and G. Y. Yeom
J. Korean Phy. Soc. 2009; 54: 981-985  
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Selective Etching of HfO2 by Using Inductively-Coupled Ar/C4F8 Plasmas and the Removal of Etch Residue on Si by Using an O2 Plasma Treatment
K. S. Min, B. J. Park, S. W. Kim, S. K. Kang, G. Y. Yeom, S. H. Heo, H. S. Hwang and C. Y. Kang
J. Korean Phy. Soc. 2008; 53: 1675-1679  
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Plasma-Enhanced Chemical Vapor Deposition of SiO2 Thin Films at Atmospheric Pressure by Using HMDS/Ar/O2
Y. S. Kim, J. H. Lee, Thuy. T. T. Pham, J. T. Lim and G. Y. Yeom
J. Korean Phy. Soc. 2008; 53: 892-896  
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Light-Emitting Characteristics of Top-Emitting Organic Light-Emitting Diodes Based on the Interfacial Electronic Feature of Cs-on-Alq3
Jong Tae Lim, June Hee Lee, Yang Su Kim and G. Y. Yeom
J. Korean Phy. Soc. 2008; 52: 476-480  
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Transparent Top-Emitting Organic Light-Emitting Diodes Using a Cs/Al/Ag/ITO Semi-Transparent Cathode
J. T. Lim, C. H. Jeong, M. S. Kim, J. H. Lee, J. W. Bae and G. Y. Yeom
J. Korean Phy. Soc. 2007; 51: 1147-1151  
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Thermally Stable Ti/Al/W/Au Multilayer Ohmic Contacts on n-Type GaN
H. C. Lee, J. W. Bae and G. Y. Yeom
J. Korean Phy. Soc. 2007; 51: 1046-1049  
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Blue Organic Light-Emitting Diodes Fabricated by Using an Enhanced Hole-Blocking Property
J. T. Lim, C. H. Jeong, J. H. Lee, M. S. Kim, J. W. Bae and G. Y. Yeom
J. Korean Phy. Soc. 2007; 51: 1019-1022  
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Study on the Low-Angle Surface Scattering of the Low-Energy Ions
K. S. Min, B. J. Park, J. B. Park, S. K. Kang, G. Y. Yeom and D. H. Lee
J. Korean Phy. Soc. 2007; 51: 967-971  
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Energy Shift During Ion Extraction from an ICP Source
O. V. Vozniy, B. J. Park, K. S. Min and G. Y. Yeom
J. Korean Phy. Soc. 2007; 50: 1271-1275  
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